Video Measuring System

Model

VMZ-S3020

VMZ-S4540

VMZ-S6555

XYZ strokes

300×200×200 mm

450×400×200 mm

650×550×200 mm

Type TZ with low magnification lens

250×200×200 mm

400×400×200 mm

600×550×200 mm

Minimum readout

0.01 μm

Maximum sample weight

20 kg (Accuracy guaranteed: 5 kg)

40 kg (Accuracy guaranteed: 20 kg)

50 kg (Accuracy guaranteed: 30 kg)

Maximum permissible error

(L: Length in mm)

EUX, MPE EUY, MPE: 1.2 + 4L / 1000 μm / EUXY, MPE: 2.0 + 4 L / 1000 μm / EUZ, MPE: 1.2 + 5 L / 1000 μm

Probing error 1),2): MPE P_F2D 0.8 μm / Probing error of the imaging probe 1),2): MPE P_FV2D 0.3 μm

Camera

Black and White / Color      1/3 CMOS Camera

Working distance

Type 1, 2 and 3: 50 mm                      Type 4: 30 mm

Type TZ: 11 mm                                  Type A: 73.5 mm (63 mm with Laser AF)

Autofocus

Laser AF (Option for Type A) / Image AF

Laser AF repeatability range

2σ ≤ 0.5 μm

Illumination

Type 1, 2, 3, and 4: Episcopic, diascopic, and 8-segment ring with 3 angles *All white LED/Type 4 has only 1 angle

Type TZ: Left objective lens: Episcopic, darkfield ; Right objective lens: Episcopic, diascopic, darkfield

Type A: Episcopic, diascopic, and 8-segment ring with 1 angle *All white LED

Power source, Power consumption

AC100 V-240 V, 50/60 Hz / 4 A − 2 A

Dimensions (W×D×H) & weight

700×730×1793 mm / approx. 265 kg

1000×1340×1818 mm / approx. 510 kg

1200×1640×1818 mm / approx. 740 kg

Controller: 190×450×450 mm / approx. 12 kg

Footprint (W×D)

2700×2400 mm

3000×3000 mm

3200×3300 mm